Annealing condition optimization and electrical characterization of amorphous LaAl O3 GaAs metal-oxide-semiconductor capacitors

Donghun Choi, James S. Harris, Maitri Warusawithana, Darrell G. Schlom

Research output: Contribution to journal › Article › peer-review

ASJC Scopus Subject Areas

@article{a38461d7291f4803a076b9d6b9da704c,

title = "Annealing condition optimization and electrical characterization of amorphous LaAl O3 GaAs metal-oxide-semiconductor capacitors",

author = "Donghun Choi and Harris, \{James S.\} and Maitri Warusawithana and Schlom, \{Darrell G.\}",

year = "2007",

doi = "10.1063/1.2748308",

language = "English",

volume = "90",

journal = "Applied Physics Letters",

issn = "0003-6951",

number = "24",

}

TY - JOUR

T1 - Annealing condition optimization and electrical characterization of amorphous LaAl O3 GaAs metal-oxide-semiconductor capacitors

AU - Choi, Donghun

AU - Harris, James S.

AU - Warusawithana, Maitri

AU - Schlom, Darrell G.

PY - 2007

Y1 - 2007

UR - https://www.scopus.com/pages/publications/34250633680

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U2 - 10.1063/1.2748308

DO - 10.1063/1.2748308

M3 - Article

AN - SCOPUS:34250633680

SN - 0003-6951

VL - 90

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 24

M1 - 243505

ER -