Anomaly of film porosity dependence on deposition rate

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@article{5cb2197d37be4e5781a3b08e081ad0d4,

title = "Anomaly of film porosity dependence on deposition rate",

author = "Stagon, \{Stephen P.\} and Hanchen Huang and \{Kevin Baldwin\}, J. and Amit Misra",

year = "2012",

month = feb,

day = "6",

doi = "10.1063/1.3683542",

language = "English",

volume = "100",

journal = "Applied Physics Letters",

issn = "0003-6951",

number = "6",

}

TY - JOUR

T1 - Anomaly of film porosity dependence on deposition rate

AU - Stagon, Stephen P.

AU - Huang, Hanchen

AU - Kevin Baldwin, J.

AU - Misra, Amit

PY - 2012/2/6

Y1 - 2012/2/6

UR - https://www.scopus.com/pages/publications/84863116244

UR - https://www.scopus.com/pages/publications/84863116244#tab=citedBy

U2 - 10.1063/1.3683542

DO - 10.1063/1.3683542

M3 - Article

AN - SCOPUS:84863116244

SN - 0003-6951

VL - 100

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 6

M1 - 061601

ER -