Fracture strength of polysilicon at stress concentrations

Jörg Bagdahn, William N. Sharpe, Osama Jadaan

Research output: Contribution to journalArticlepeer-review

Original languageAmerican English
Pages (from-to)302-312
JournalJournal of Microelectromechanical Systems
Volume12
Issue number3
DOIs
StatePublished - Jun 1 2003

Keywords

  • Tensile stress
  • Materials testing
  • Shape measurement
  • NASA
  • Finite element methods

Disciplines

  • Materials Science and Engineering
  • Analytical Chemistry
  • Structural Engineering

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