@article{93f1a868828f4c0ea0dc76b9289b28da,
title = "Fracture strength of polysilicon at stress concentrations",
keywords = "Tensile stress, Materials testing, Shape measurement, NASA, Finite element methods",
author = "J{\"o}rg Bagdahn and Sharpe, {William N.} and Osama Jadaan",
note = "Mechanical design of MEMS requires the ability to predict the strength of load-carrying components with stress concentrations. The majority of these microd",
year = "2003",
month = jun,
day = "1",
doi = "10.1109/JMEMS.2003.814130",
language = "American English",
volume = "12",
pages = "302--312",
journal = "Journal of Microelectromechanical Systems",
issn = "1941-0158",
number = "3",
}