@article{64556554b0834f27a72bc29e3b9f68f9,
title = "Fracture strength of silicon carbide microspecimens",
author = "Sharpe, \{William N.\} and Osama Jadaan and Beheim, \{Glenn M.\} and Quinn, \{George D.\} and Nemeth, \{Noel N.\}",
note = "Polycrystalline silicon carbide tensile microspecimens 3.1 mm long were produced by deep reactive ion etching of wafers on the order of 150 /spl mu/m thick",
year = "2005",
month = oct,
day = "1",
doi = "10.1109/JMEMS.2005.851862",
language = "American English",
volume = "14",
journal = "IEEE\textbackslash{}/ASME Journal of Microelectromechanical Systems",
issn = "1057-7157",
}