Fracture strength of silicon carbide microspecimens

William N. Sharpe; Osama Jadaan; Glenn M. Beheim; George D. Quinn; Noel N. Nemeth

doi:10.1109/JMEMS.2005.851862

Fracture strength of silicon carbide microspecimens

William N. Sharpe, Osama Jadaan, Glenn M. Beheim, George D. Quinn, Noel N. Nemeth

University of Wisconsin–Platteville

Research output: Contribution to journal › Article › peer-review

Original language	American English
Journal	IEEE\/ASME Journal of Microelectromechanical Systems
Volume	14
DOIs	https://doi.org/10.1109/JMEMS.2005.851862
State	Published - Oct 1 2005
Externally published	Yes

Disciplines

Other Engineering
Materials Science and Engineering
Analytical Chemistry

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Cite this

@article{64556554b0834f27a72bc29e3b9f68f9,

title = "Fracture strength of silicon carbide microspecimens",

author = "Sharpe, \{William N.\} and Osama Jadaan and Beheim, \{Glenn M.\} and Quinn, \{George D.\} and Nemeth, \{Noel N.\}",

note = "Polycrystalline silicon carbide tensile microspecimens 3.1 mm long were produced by deep reactive ion etching of wafers on the order of 150 /spl mu/m thick",

year = "2005",

month = oct,

day = "1",

doi = "10.1109/JMEMS.2005.851862",

language = "American English",

volume = "14",

journal = "IEEE\textbackslash{}/ASME Journal of Microelectromechanical Systems",

issn = "1057-7157",

}

TY - JOUR

T1 - Fracture strength of silicon carbide microspecimens

AU - Sharpe, William N.

AU - Jadaan, Osama

AU - Beheim, Glenn M.

AU - Quinn, George D.

AU - Nemeth, Noel N.

N1 - Polycrystalline silicon carbide tensile microspecimens 3.1 mm long were produced by deep reactive ion etching of wafers on the order of 150 /spl mu/m thick

PY - 2005/10/1

Y1 - 2005/10/1

UR - http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=1516172

U2 - 10.1109/JMEMS.2005.851862

DO - 10.1109/JMEMS.2005.851862

M3 - Article

SN - 1057-7157

VL - 14

JO - IEEE\/ASME Journal of Microelectromechanical Systems

JF - IEEE\/ASME Journal of Microelectromechanical Systems

ER -

Fracture strength of silicon carbide microspecimens

Disciplines

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