Fracture strength of single-crystal silicon carbide microspecimens at 24 °C and 1000 °C

William N. Sharpe, Gleen M. Beheim, Laura J. Evans, Noel N. Nemeth, Osama M. Jadaan

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)244-254
Number of pages11
JournalJournal of Microelectromechanical Systems
Volume17
Issue number1
DOIs
StatePublished - Feb 2008
Externally publishedYes

ASJC Scopus Subject Areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

Keywords

  • Ceramics
  • Material testing
  • Silicon carbide (SiC)
  • Temperature

Disciplines

  • Materials Science and Engineering

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