Hybrid strategies in nanolithography

Héctor M. Saavedra; Thomas J. Mullen; Pengpeng Zhang; Daniel C. Dewey; Shelley A. Claridge; Paul S. Weiss

doi:10.1088/0034-4885/73/3/036501

Hybrid strategies in nanolithography

Héctor M. Saavedra, Thomas J. Mullen, Pengpeng Zhang, Daniel C. Dewey, Shelley A. Claridge, Paul S. Weiss

Research output: Contribution to journal › Article › peer-review

Original language	English
Article number	036501
Journal	Reports on Progress in Physics
Volume	73
Issue number	3
DOIs	https://doi.org/10.1088/0034-4885/73/3/036501
State	Published - 2010
Externally published	Yes

ASJC Scopus Subject Areas

General Physics and Astronomy

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10.1088/0034-4885/73/3/036501

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title = "Hybrid strategies in nanolithography",

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language = "English",

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AU - Saavedra, Héctor M.

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AU - Zhang, Pengpeng

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AU - Weiss, Paul S.

PY - 2010

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VL - 73

JO - Reports on Progress in Physics

JF - Reports on Progress in Physics

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Hybrid strategies in nanolithography

ASJC Scopus Subject Areas

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