| Original language | English |
|---|---|
| Article number | 036501 |
| Journal | Reports on Progress in Physics |
| Volume | 73 |
| Issue number | 3 |
| DOIs | |
| State | Published - 2010 |
| Externally published | Yes |
ASJC Scopus Subject Areas
- General Physics and Astronomy
Hybrid strategies in nanolithography
- Héctor M. Saavedra
- , Thomas J. Mullen
- , Pengpeng Zhang
- , Daniel C. Dewey
- , Shelley A. Claridge
- , Paul S. Weiss
Research output: Contribution to journal › Article › peer-review