In Situ Dynamic Spectroscopic Ellipsometry Characterization of Cu-Ligated Mercaptoalkanoic Acid “Molecular” Ruler Multilayers

Alexandra M. Patron; Kayleigh L. Coleman; Thomas J. Mullen

doi:10.3390/mi15070826

In Situ Dynamic Spectroscopic Ellipsometry Characterization of Cu-Ligated Mercaptoalkanoic Acid “Molecular” Ruler Multilayers

Alexandra M. Patron, Kayleigh L. Coleman, Thomas J. Mullen

Chemistry and Biochemistry

University of North Florida

Research output: Contribution to journal › Article › peer-review

Original language	English
Article number	826
Pages (from-to)	826
Journal	Micromachines
Volume	15
Issue number	7
DOIs	https://doi.org/10.3390/mi15070826
State	Published - Jul 2024

ASJC Scopus Subject Areas

Control and Systems Engineering
Mechanical Engineering
Electrical and Electronic Engineering

Keywords

hybrid nanolithography
mercaptohexadecanoic acid
metal-ligated multilayer
molecular ruler
self-assembled monolayer
spectroscopic ellipsometry

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10.3390/mi15070826

Cite this

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title = "In Situ Dynamic Spectroscopic Ellipsometry Characterization of Cu-Ligated Mercaptoalkanoic Acid “Molecular” Ruler Multilayers",

keywords = "hybrid nanolithography, mercaptohexadecanoic acid, metal-ligated multilayer, molecular ruler, self-assembled monolayer, spectroscopic ellipsometry",

author = "Patron, {Alexandra M.} and Coleman, {Kayleigh L.} and Mullen, {Thomas J.}",

note = "Publisher Copyright: {\textcopyright} 2024 by the authors.",

year = "2024",

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doi = "10.3390/mi15070826",

language = "English",

volume = "15",

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AU - Patron, Alexandra M.

AU - Coleman, Kayleigh L.

AU - Mullen, Thomas J.

PY - 2024/7

Y1 - 2024/7

KW - hybrid nanolithography

KW - mercaptohexadecanoic acid

KW - metal-ligated multilayer

KW - molecular ruler

KW - self-assembled monolayer

KW - spectroscopic ellipsometry

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DO - 10.3390/mi15070826

M3 - Article

C2 - 39064337

AN - SCOPUS:85199639700

VL - 15

SP - 826

JO - Micromachines

JF - Micromachines

IS - 7

M1 - 826

ER -

In Situ Dynamic Spectroscopic Ellipsometry Characterization of Cu-Ligated Mercaptoalkanoic Acid “Molecular” Ruler Multilayers

ASJC Scopus Subject Areas

Keywords

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