Microelectromechanical system microhotplates for reliability testing of thin films and nanowires

Juan C. Aceros, Nicol E. McGruer, George G. Adams

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	918-926
Number of pages	9
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	26
Issue number	3
DOIs	https://doi.org/10.1116/1.2906263
State	Published - 2008
Externally published	Yes

ASJC Scopus Subject Areas

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