Microelectromechanical system microhotplates for reliability testing of thin films and nanowires

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	918-926
Number of pages	9
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	26
Issue number	3
DOIs	https://doi.org/10.1116/1.2906263
State	Published - 2008
Externally published	Yes

ASJC Scopus Subject Areas

@article{2fb0e64a7f374a22bca3cf369cbd5d52,

title = "Microelectromechanical system microhotplates for reliability testing of thin films and nanowires",

author = "Aceros, \{Juan C.\} and McGruer, \{Nicol E.\} and Adams, \{George G.\}",

year = "2008",

doi = "10.1116/1.2906263",

language = "English",

volume = "26",

pages = "918--926",

number = "3",

}

TY - JOUR

T1 - Microelectromechanical system microhotplates for reliability testing of thin films and nanowires

AU - Aceros, Juan C.

AU - McGruer, Nicol E.

AU - Adams, George G.

PY - 2008

Y1 - 2008

UR - https://www.scopus.com/pages/publications/44649101307

UR - https://www.scopus.com/pages/publications/44649101307#tab=citedBy

U2 - 10.1116/1.2906263

DO - 10.1116/1.2906263

M3 - Article

AN - SCOPUS:44649101307

SN - 1071-1023

VL - 26

SP - 918

EP - 926

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 3

ER -