@article{1dd2be344d094086aedc6cb256fe7ba3,
title = "Strength and Weibull Characterization of Polysilicon Membranes for Mems Applications",
author = "Osama Jadaan and Joseph Palko and Noel Nerneth and Anna Dubnisheva and Shuvo Roy and Aaron Fleischman",
note = "Please check your email for instructions on resetting your password. If you do not receive an email within 10 minutes, your email address may not be registered, and you may need to create a new Wiley Online Library account.",
year = "2008",
month = mar,
day = "27",
doi = "10.1002/9780470291313.ch53",
language = "American English",
}