Strength and weibull characterization of polysilicon membranes for MEMS applications

Osama Jadaan; Joseph Palko; Noel Nemeth; Anna Dubnisheva; Shuvo Roy; Aaron Fleischman

Strength and weibull characterization of polysilicon membranes for MEMS applications

Osama Jadaan, Joseph Palko, Noel Nemeth, Anna Dubnisheva, Shuvo Roy, Aaron Fleischman

Research output: Contribution to conference › Proceedings › peer-review

Original language	English
Pages	557-568
Number of pages	12
State	Published - 2006
Externally published	Yes
Event	Mechanical Properties and Performance of Engineering Ceramics and Composites Symposium - 30th International Conference on Advanced Ceramics and Composites - Cocoa Beach, FL, United States Duration: Jan 22 2006 → Jan 27 2006

Conference

Conference	Mechanical Properties and Performance of Engineering Ceramics and Composites Symposium - 30th International Conference on Advanced Ceramics and Composites
Country/Territory	United States
City	Cocoa Beach, FL
Period	1/22/06 → 1/27/06

ASJC Scopus Subject Areas

Ceramics and Composites
Materials Chemistry

Cite this

Jadaan, O., Palko, J., Nemeth, N., Dubnisheva, A., Roy, S., & Fleischman, A. (2006). Strength and weibull characterization of polysilicon membranes for MEMS applications. 557-568. Paper presented at Mechanical Properties and Performance of Engineering Ceramics and Composites Symposium - 30th International Conference on Advanced Ceramics and Composites, Cocoa Beach, FL, United States.

Strength and weibull characterization of polysilicon membranes for MEMS applications. / Jadaan, Osama; Palko, Joseph; Nemeth, Noel et al.
2006. 557-568 Paper presented at Mechanical Properties and Performance of Engineering Ceramics and Composites Symposium - 30th International Conference on Advanced Ceramics and Composites, Cocoa Beach, FL, United States.

Research output: Contribution to conference › Proceedings › peer-review

Jadaan, O, Palko, J, Nemeth, N, Dubnisheva, A, Roy, S & Fleischman, A 2006, 'Strength and weibull characterization of polysilicon membranes for MEMS applications', Paper presented at Mechanical Properties and Performance of Engineering Ceramics and Composites Symposium - 30th International Conference on Advanced Ceramics and Composites, Cocoa Beach, FL, United States, 1/22/06 - 1/27/06 pp. 557-568.

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year = "2006",

language = "English",

pages = "557--568",

note = "Mechanical Properties and Performance of Engineering Ceramics and Composites Symposium - 30th International Conference on Advanced Ceramics and Composites ; Conference date: 22-01-2006 Through 27-01-2006",

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T1 - Strength and weibull characterization of polysilicon membranes for MEMS applications

AU - Jadaan, Osama

AU - Palko, Joseph

AU - Nemeth, Noel

AU - Dubnisheva, Anna

AU - Roy, Shuvo

AU - Fleischman, Aaron

PY - 2006

Y1 - 2006

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M3 - Proceedings

AN - SCOPUS:33845972593

SP - 557

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T2 - Mechanical Properties and Performance of Engineering Ceramics and Composites Symposium - 30th International Conference on Advanced Ceramics and Composites

Y2 - 22 January 2006 through 27 January 2006

ER -

Strength and weibull characterization of polysilicon membranes for MEMS applications

Conference

ASJC Scopus Subject Areas

Other files and links

Cite this