The removal of nanoparticles from sub-micron trenches using megasonics

Pegah Karimi; Taehoon Kim; Juan Aceros; Jingoo Park; Ahmed A. Busnaina

doi:10.1016/j.mee.2009.11.052

The removal of nanoparticles from sub-micron trenches using megasonics

Pegah Karimi, Taehoon Kim, Juan Aceros, Jingoo Park, Ahmed A. Busnaina

Northeastern University

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1665-1668
Number of pages	4
Journal	Microelectronic Engineering
Volume	87
Issue number	9
DOIs	https://doi.org/10.1016/j.mee.2009.11.052
State	Published - Nov 2010
Externally published	Yes

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

Keywords

Effect of power on particle removal from trenches
Effect of time on particle removal from trenches
Megasonic cleaning
Nanoparticle removal from trenches
Nanoparticle removal using megasonic
Trench cleaning using megasonic

Access to Document

10.1016/j.mee.2009.11.052

Cite this

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title = "The removal of nanoparticles from sub-micron trenches using megasonics",

keywords = "Effect of power on particle removal from trenches, Effect of time on particle removal from trenches, Megasonic cleaning, Nanoparticle removal from trenches, Nanoparticle removal using megasonic, Trench cleaning using megasonic",

author = "Pegah Karimi and Taehoon Kim and Juan Aceros and Jingoo Park and Busnaina, {Ahmed A.}",

year = "2010",

month = nov,

doi = "10.1016/j.mee.2009.11.052",

language = "English",

volume = "87",

pages = "1665--1668",

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T1 - The removal of nanoparticles from sub-micron trenches using megasonics

AU - Karimi, Pegah

AU - Kim, Taehoon

AU - Aceros, Juan

AU - Park, Jingoo

AU - Busnaina, Ahmed A.

PY - 2010/11

Y1 - 2010/11

KW - Effect of power on particle removal from trenches

KW - Effect of time on particle removal from trenches

KW - Megasonic cleaning

KW - Nanoparticle removal from trenches

KW - Nanoparticle removal using megasonic

KW - Trench cleaning using megasonic

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U2 - 10.1016/j.mee.2009.11.052

DO - 10.1016/j.mee.2009.11.052

M3 - Article

AN - SCOPUS:77955227865

SN - 0167-9317

VL - 87

SP - 1665

EP - 1668

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 9

ER -

The removal of nanoparticles from sub-micron trenches using megasonics

ASJC Scopus Subject Areas

Keywords

Access to Document

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Cite this