Anomaly of film porosity dependence on deposition rate

Stephen P. Stagon, Hanchen Huang, J. Kevin Baldwin, Amit Misra

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title = "Anomaly of film porosity dependence on deposition rate",

author = "Stagon, {Stephen P.} and Hanchen Huang and {Kevin Baldwin}, J. and Amit Misra",

year = "2012",

month = feb,

day = "6",

doi = "10.1063/1.3683542",

language = "English",

volume = "100",

journal = "Applied Physics Letters",

issn = "0003-6951",

number = "6",

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AU - Misra, Amit

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JF - Applied Physics Letters

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