Anomaly of film porosity dependence on deposition rate

Stephen P. Stagon, Hanchen Huang, J. Kevin Baldwin, Amit Misra

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title = "Anomaly of film porosity dependence on deposition rate",

author = "Stagon, \{Stephen P.\} and Hanchen Huang and \{Kevin Baldwin\}, J. and Amit Misra",

year = "2012",

month = feb,

day = "6",

doi = "10.1063/1.3683542",

language = "English",

volume = "100",

journal = "Applied Physics Letters",

issn = "0003-6951",

number = "6",

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AU - Huang, Hanchen

AU - Kevin Baldwin, J.

AU - Misra, Amit

PY - 2012/2/6

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U2 - 10.1063/1.3683542

DO - 10.1063/1.3683542

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JO - Applied Physics Letters

JF - Applied Physics Letters

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