Hybrid strategies in nanolithography

Héctor M. Saavedra; Thomas J. Mullen; Pengpeng Zhang; Daniel C. Dewey; Shelley A. Claridge; Paul S. Weiss

doi:10.1088/0034-4885/73/3/036501

Hybrid strategies in nanolithography

Héctor M. Saavedra
, Thomas J. Mullen
, Pengpeng Zhang
, Daniel C. Dewey
, Shelley A. Claridge
, Paul S. Weiss

Producción científica: Article › revisión exhaustiva

Idioma original	English
Número de artículo	036501
Publicación	Reports on Progress in Physics
Volumen	73
N.º	3
DOI	https://doi.org/10.1088/0034-4885/73/3/036501
Estado	Published - 2010
Publicado de forma externa	Sí

ASJC Scopus Subject Areas

General Physics and Astronomy

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10.1088/0034-4885/73/3/036501

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AU - Weiss, Paul S.

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