TY - JOUR
T1 - In Situ Dynamic Spectroscopic Ellipsometry Characterization of Cu-Ligated Mercaptoalkanoic Acid “Molecular” Ruler Multilayers
AU - Patron, Alexandra M.
AU - Coleman, Kayleigh L.
AU - Mullen, Thomas J.
N1 - Publisher Copyright:
© 2024 by the authors.
PY - 2024/7
Y1 - 2024/7
KW - hybrid nanolithography
KW - mercaptohexadecanoic acid
KW - metal-ligated multilayer
KW - molecular ruler
KW - self-assembled monolayer
KW - spectroscopic ellipsometry
UR - http://www.scopus.com/inward/record.url?scp=85199639700&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85199639700&partnerID=8YFLogxK
UR - https://www.mendeley.com/catalogue/7cc02bdf-7ca5-30d4-9175-00b2f8ecb1f7/
U2 - 10.3390/mi15070826
DO - 10.3390/mi15070826
M3 - Article
C2 - 39064337
AN - SCOPUS:85199639700
VL - 15
SP - 826
JO - Micromachines
JF - Micromachines
IS - 7
M1 - 826
ER -