Microelectromechanical system microhotplates for reliability testing of thin films and nanowires

Producción científica: Article › revisión exhaustiva

Idioma original	English
Páginas (desde-hasta)	918-926
Número de páginas	9
Publicación	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volumen	26
N.º	3
DOI	https://doi.org/10.1116/1.2906263
Estado	Published - 2008
Publicado de forma externa	Sí

ASJC Scopus Subject Areas

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title = "Microelectromechanical system microhotplates for reliability testing of thin films and nanowires",

author = "Aceros, \{Juan C.\} and McGruer, \{Nicol E.\} and Adams, \{George G.\}",

year = "2008",

doi = "10.1116/1.2906263",

language = "English",

volume = "26",

pages = "918--926",

number = "3",

}

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T1 - Microelectromechanical system microhotplates for reliability testing of thin films and nanowires

AU - Aceros, Juan C.

AU - McGruer, Nicol E.

AU - Adams, George G.

PY - 2008

Y1 - 2008

UR - https://www.scopus.com/pages/publications/44649101307

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U2 - 10.1116/1.2906263

DO - 10.1116/1.2906263

M3 - Article

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SN - 1071-1023

VL - 26

SP - 918

EP - 926

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 3

ER -