TY - JOUR
T1 - Optimization of superconducting niobium nitride thin films via high-power impulse magnetron sputtering
AU - Horne, Hudson T.
AU - Hugo, Collin M.
AU - Reid, Brandon C.
AU - Santavicca, Daniel F.
N1 - Publisher Copyright:
© 2024 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
PY - 2024/12
Y1 - 2024/12
KW - high-power impulse magnetron sputtering
KW - niobium nitride
KW - sputter deposition
KW - superconducting thin films
UR - http://www.scopus.com/inward/record.url?scp=85209898025&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85209898025&partnerID=8YFLogxK
UR - http://arxiv.org/abs/2408.17256
UR - https://www.mendeley.com/catalogue/f93a5e66-e1eb-314d-b06a-4cba59b5b7fb/
U2 - 10.1088/1361-6668/ad921a
DO - 10.1088/1361-6668/ad921a
M3 - Article
AN - SCOPUS:85209898025
SN - 0953-2048
VL - 37
JO - Superconductor Science and Technology
JF - Superconductor Science and Technology
IS - 12
M1 - 125017
ER -