Strength and weibull characterization of polysilicon membranes for MEMS applications

Osama Jadaan, Joseph Palko, Noel Nemeth, Anna Dubnisheva, Shuvo Roy, Aaron Fleischman

Producción científica: Proceedingsrevisión exhaustiva

Idioma originalEnglish
Páginas557-568
Número de páginas12
EstadoPublished - 2006
Publicado de forma externa
EventoMechanical Properties and Performance of Engineering Ceramics and Composites Symposium - 30th International Conference on Advanced Ceramics and Composites - Cocoa Beach, FL, United States
Duración: ene 22 2006ene 27 2006

Conference

ConferenceMechanical Properties and Performance of Engineering Ceramics and Composites Symposium - 30th International Conference on Advanced Ceramics and Composites
País/TerritorioUnited States
CiudadCocoa Beach, FL
Período1/22/061/27/06

ASJC Scopus Subject Areas

  • Ceramics and Composites
  • Materials Chemistry

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