@conference{5020abbfecc8485aabd621ad975b8374,
title = "Strength and weibull characterization of polysilicon membranes for MEMS applications",
author = "Osama Jadaan and Joseph Palko and Noel Nemeth and Anna Dubnisheva and Shuvo Roy and Aaron Fleischman",
year = "2006",
language = "English",
pages = "557--568",
note = "Mechanical Properties and Performance of Engineering Ceramics and Composites Symposium - 30th International Conference on Advanced Ceramics and Composites ; Conference date: 22-01-2006 Through 27-01-2006",
}