The removal of nanoparticles from sub-micron trenches using megasonics

Pegah Karimi; Taehoon Kim; Juan Aceros; Jingoo Park; Ahmed A. Busnaina

doi:10.1016/j.mee.2009.11.052

The removal of nanoparticles from sub-micron trenches using megasonics

Pegah Karimi, Taehoon Kim, Juan Aceros, Jingoo Park, Ahmed A. Busnaina

Northeastern University

Producción científica: Article › revisión exhaustiva

Idioma original	English
Páginas (desde-hasta)	1665-1668
Número de páginas	4
Publicación	Microelectronic Engineering
Volumen	87
N.º	9
DOI	https://doi.org/10.1016/j.mee.2009.11.052
Estado	Published - nov 2010
Publicado de forma externa	Sí

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

Acceder al documento

10.1016/j.mee.2009.11.052

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Citar esto

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